Long citation – Jessica Schleitzer 

Plasma Structure and Dynamics in Dual-Frequency Discharges: A Multi-Diagnostic Approach from Bulk to Sheath

Jessica Schleitzer has made groundbreaking contributions to low pressure dual frequency discharges in her thesis. She concentrated on the manipulation of microparticles by an optical tweezer, in principle an adjustable laser trap, for precise measurements of the force balances along the radius from the middle to the sheath in dual frequency RF discharges. At high laser power, i.e. strong trapping, she measured the electric field in the sheath while at low laser power, i.e. at higher sensitivity, she was able to measure the ion drag force in the presheath for the first time. Furthermore, combined with other diagnostic methods, Jessica Schleitzer was able to consistently reveal the observed phase dependency of the electrical asymmetry effect in these dual frequency discharges. Additionally, she provides a consistent explanation of the interaction between the various regions, the bulk, the presheath and the sheath as well as between the global control and the local, microscopic effects of the dual frequency RF discharges which are highly important for microelectronics manufacturing. She published her scientific achievements in five highly-ranked journals and six conference contributions. Recognized with various awards, she bridges fundamental investigations with new and highly valuable applications not only in microelectronics but also in various thin film deposition technologies.